Fabrication of 4-Inch Nano Patterned Wafer with High Uniformity by Laser Interference Lithography
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第一作者:
Yu, Gen
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CHINESE PHYSICS LETTERS
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论文题目:
Fabrication of 4-Inch Nano Patterned Wafer with High Uniformity by Laser Interference Lithography
发表年度:
2018
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